Automated reactive thermal evaporation system for transparent conductive coatings

Authors

  • Miguel Fernandes Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal
  • Yuri Y. Vygranenko Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal
  • Manuela Vieira Electronics Telecommunications and Computer Engineering, ISEL, Lisbon, Portugal CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal
  • Guilherme Lavareda CTS-UNINOVA, Quinta da Torre, 2829-516, Caparica, Portugal Departamento de Ciência dos Materiais, Universidade Nova de Lisboa, Campus da Caparica, 2829-516 Caparica, Portugal
  • Carlos Nunes de Carvalho
  • Ana Amaral

DOI:

https://doi.org/10.34629/ipl.isel.i-ETC.36

Keywords:

TCO, Solar cell, PLastic substrate

Abstract

This work presents fully automated plasma-enhanced reactive thermal evaporation system (rf-PERTE) that can be used for the deposition of transparent metal oxide films with high reproducibility of their electrical and optical properties. The developed hardware/software platform enables the full control over the critical deposition conditions such as mass flow of oxygen, process pressure, current flowing through crucible and rf-power. For indium oxide films on glass substrates a resistivity of 9×10-4 Ω-cm and a transmittance of 90% in the visible spectral range were achieved without substrate heating. The system is also suitable for the deposition of transparent conducting coatings in a wide range of plastic substrates, for applications in the field of flexible sensors or solar cells. In particular, we have successfully deposited indium oxide on PEN (polyethylene naphthalate) sheets with electrical and optical properties approaching the ones of the films deposited on glass substrates.

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Author Biographies

  • Carlos Nunes de Carvalho

    Departamento de Ciência dos Materiais, Universidade Nova de Lisboa, Campus da Caparica, 2829-516 Caparica, Portugal

    Physics and Engineering of Advanced Materials, Universidade de Lisboa, Av. Rovisco Pais 1, 1049-001 Lisboa, Portuga

  • Ana Amaral
    Physics and Engineering of Advanced Materials, Universidade de Lisboa, Av. Rovisco Pais 1, 1049-001 Lisboa, Portuga

References

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Frank G, Kauer E, Köstlin H, Schmitte FJ, Transparent heat-reflecting coatings for solar applications based on highly doped tin oxide and indium oxide, Solar Energy Materials 1983;8:4-387.

Lavareda G, Nunes de Carvalho C, Fortunato E, Ramos AR, Alves E, Conde O, Amaral A, Transparent thin film transistors based on indium oxide semiconductor, J Non-Crystalline Solids 2006; 352-2311.

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Published

2017-10-26

Issue

Vol. 3 No. 1 (2017): The CETC2016 Issue (A)

Section

CETC

License

Authors of articles published in the ISEL Academic Journal of Electronics, Telecommunications and Computers retain copyright of their work, without restriction, licensing it under the Creative Commons Attribution-NonCommercial 4.0 Unported License. This license allows free download of the articles from the i-ETC website, as well as re-use and re-distribution without restriction, as long as the original work is properly cited and not used for commercial purposes.